Jaeger Chapter 1

This is the first post in my new category, Microelectronic Fabrication (the sub-category is VLSI). It’s a summary of the points I found interesting (read: points I am likely to forget) in the first chapter of the textbook “Introduction to Microelectronic Fabrication” by Richard C. Jaeger. The first chapter gives a brief overview of the entire subject.

Summary
– Basic processing steps:

• Oxidation
• Photolithography
• Etching
• Diffusion
• Evaporating or sputtering
• CVD
• Ion implantation
• Epitaxy
• Annealing

– Epitaxy (I need to read more about this)
– Two beak shapes of silicon dioxide (need to find out the reason behind this)
– Understood the NMOS and CMOS processes (figures 1.4 to 1.10 provde good reference material)